2025, Vol. 5, Issue 1, Part A

Methodology: This study proposes a co-simulation approach integrating Coventor Ware for structural MEMS modeling and Keysight ADS for RF circuit simulation. A clamped-clamped silicon beam resonator was designed with dimensions optimized for operation around 17 MHz. Finite element modal and harmonic analyses were conducted to extract electromechanical characteristics such as resonance frequency, displacement, and quality factor. These characteristics were abstracted into an equivalent electrical model and incorporated into a Colpitts oscillator in ADS to evaluate frequency stability and phase noise.

Results: The MEMS resonator maintained a consistent resonance frequency of 17.26 MHz across varying actuation voltages and demonstrated a high Q-factor (~10,200). When integrated with the oscillator circuit, the output frequency aligned closely with the resonator’s natural frequency. The phase noise improved with bias voltage, achieving -92.7 dBc/Hz at a 10 kHz offset for 1.8 V bias. ANOVA and standard deviation analyses confirmed the statistical significance and stability of the results.

Discussion: The findings validate the reliability of the co-simulation framework and highlight the impact of resonator geometry and bias voltage on performance. Compared to prior studies, this work bridges the gap between mechanical MEMS modeling and RF circuit implementation, offering better integration accuracy and reduced design uncertainty.

Conclusion: The integrated Coventor Ware-ADS approach provides a scalable and effective design methodology for MEMS-based frequency synthesizers. Practical recommendations include bias voltage tuning, FEM-based resonator optimization, and circuit-level parametric sweeps to enhance performance. This approach holds significant potential for compact, low-power RF applications.